中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser device

文献类型:专利

作者YOSHIKAWA NORIYUKI; SHIMIZU YUUICHI
发表日期1986-01-27
专利号JP1986018190A
著作权人MATSUSHITA DENKI SANGYO KK
国家日本
文献子类发明申请
其他题名Semiconductor laser device
英文摘要PURPOSE:To obtain satisfactory bonding strength and suppress the occurrence of a short-circuiting phenomenon due to an undesirable rise of Sn, by employing an Si sub-mount having a multiplicity of parallel grooves all over a surface thereof which is bonded to a semiconductor laser chip. CONSTITUTION:An Si wafer is provided with grooves by a single etching treatment. Ni dry plating is effected, and deposition of Cr, Ni-Cr, Ni and Sn is carried out by evaporation. The wafer is diced to obtain an Si sub-mount 9. Since the Si sub-mount 9 has a multiplicity of parallel grooves arranged at a distance smaller than the width of a semiconductor laser chip 1, even the chip 1 around which a coating agent passes after the bonding can be reliably bonded with excellent adhesion between two bonding surfaces. In addition, the deposited metal layer Sn 2, when heated at high temperature during the bonding, flows in a direction in which it fills the grooves. Therefore, the Sn 2 can hardly rise.
公开日期1986-01-27
申请日期1984-07-05
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/74066]  
专题半导体激光器专利数据库
作者单位MATSUSHITA DENKI SANGYO KK
推荐引用方式
GB/T 7714
YOSHIKAWA NORIYUKI,SHIMIZU YUUICHI. Semiconductor laser device. JP1986018190A. 1986-01-27.

入库方式: OAI收割

来源:西安光学精密机械研究所

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