中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Optical integrated circuit

文献类型:专利

作者SAKANO SHINJI; INOUE HIROAKI; NAKAMURA HITOSHI; KATSUYAMA TOSHIO; MATSUMURA HIROYOSHI
发表日期1987-06-19
专利号JP1987136886A
著作权人HITACHI LTD
国家日本
文献子类发明申请
其他题名Optical integrated circuit
英文摘要PURPOSE:To eliminate an emitting end surface and introduce an emitted beam from a light emitting device into an external modulator efficiently by a method wherein the light emitting device made of compound semiconductor and a light modulating device made of compound semiconductor of the same crystal system as a compound semiconductor crystal substrate are provided on the compound semiconductor crystal substrate in a monolithic structure and coupled with each other through an optical waveguide. CONSTITUTION:A diffraction grating 1-2 is engraved on an InP substrate 3 and an active layer 1-1 and a guide layer 1-3 made of InGaAsP and an InP layer 1-4 are formed on the diffraction grating 1-2 by crystal growth. After a multiplayer crystal layer for a laser is removed, multilayer crystal for an optical switch, in which an optical waveguide 2-1 is made of InGaAsP, is made to grow. After regions except a DFB laser and the optical waveguide of the optical switch part are simultaneously etched, InP crystal, which has a lower refractive index than InGaAsP, is made to grow on the regions other than the waveguide. Further, the reflective region 2 of the optical switch is doped with an impurity (for instance Zn) to concentrate an injected current to the region 2. As an emitting end surface is eliminated, the emitter beam from the DFB laser can be coupled with the optical waveguide 2-1 of the optical switch efficiently.
公开日期1987-06-19
申请日期1985-12-11
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/74829]  
专题半导体激光器专利数据库
作者单位HITACHI LTD
推荐引用方式
GB/T 7714
SAKANO SHINJI,INOUE HIROAKI,NAKAMURA HITOSHI,et al. Optical integrated circuit. JP1987136886A. 1987-06-19.

入库方式: OAI收割

来源:西安光学精密机械研究所

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