Semiconductor laser device
文献类型:专利
作者 | ARIMOTO SATOSHI |
发表日期 | 1992-10-27 |
专利号 | JP1992303986A |
著作权人 | MITSUBISHI ELECTRIC CORP |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Semiconductor laser device |
英文摘要 | PURPOSE:To easily and highly accurately form the ridge of an AlGaAs ridge waveguide type laser device. CONSTITUTION:The upper clad layer of a ridge waveguide type semiconductor laser device is constituted in a two-layer structure of the first upper clad layer 4b of p-type AlGaAs and second upper clad layer 4c of p-type AlGaInP. Since these two materials can be completely removed by selective etching, the ridge section of this laser device can be formed only etching the layer 4c to a ridge- like shape by using the layer 4b as an etching stopper. |
公开日期 | 1992-10-27 |
申请日期 | 1991-03-29 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/75881] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | MITSUBISHI ELECTRIC CORP |
推荐引用方式 GB/T 7714 | ARIMOTO SATOSHI. Semiconductor laser device. JP1992303986A. 1992-10-27. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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