中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser

文献类型:专利

作者MATSUOKA TAKASHI; SASAKI TORU; ANDOU TAKASHI
发表日期1989-07-05
专利号JP1989169984A
著作权人NIPPON TELEGR & TELEPH CORP
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To obtain a semiconductor laser, a conductive region of which is limited, which has high efficiency and a high output and can be modulated at high speed and yield of which can be realized to a high degree through an easily executable process, by insulating the outside of the conductive region or increasing resistance thereof. CONSTITUTION:A buffer layer 2, an active layer 3, a clad layer 4 and a cap layer 9 are grown continuously onto a substrate The substrate side is polished with feather or cloth down to a thin layer. Electrodes 6, 7 are evaporated. The resistance of regions 11 is increased through the following method. That is, electron rays are applied. Consequently, the conductivity type of the regions 11 is altered. The cap layer 9 is turned into a high resistance layer having a resistivity of 10OMEGAcm or more through the treatment of annealing in a nitrogen atmosphere. The resistance of the layer 9 is stably kept high extending over 400 deg.C or more. Accordingly, a crystal is insulated or resistance thereof is increased by an endogenous defect stable up to approximately 400 deg.C, thus limiting a current injection region.
公开日期1989-07-05
申请日期1987-12-24
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/75958]  
专题半导体激光器专利数据库
作者单位NIPPON TELEGR & TELEPH CORP
推荐引用方式
GB/T 7714
MATSUOKA TAKASHI,SASAKI TORU,ANDOU TAKASHI. Semiconductor laser. JP1989169984A. 1989-07-05.

入库方式: OAI收割

来源:西安光学精密机械研究所

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