中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser device

文献类型:专利

作者KONO TOSHIHIRO; TSUJI SHINJI; HANEDA MAKOTO; ONO YUICHI; AIKI KUNIO
发表日期1991-05-02
专利号JP1991105991A
著作权人株式会社日立製作所
国家日本
文献子类发明申请
其他题名Semiconductor laser device
英文摘要PURPOSE:To arrange that an electrode does not become an obstacle when other elements are laminated and integrated and to realize an integration easily by a structure wherein a p-side electrode and an n-side electrode are formed on the same plane and a laser beam is applied from the side of a semiconductor substrate. CONSTITUTION:A p-AlXGa1-XAs substrate 2 which acts as a passage of an electric current between a p-side region and an n-side region is grown on an AlXGa1-XAs substrate 1; in addition, a p-AlGaAs multilayer-film reflection layer 3, a clad layer 4, a multiple quantum well active layer 5, an n-AlXGa1-XAs layer 6, an n-AlGaAs multilayer-film reflection layer 7 and a contact layer 8 are laminated one after another. Zn is diffused 9 to this wafer; the p-type region and the n-type region are isolated by forming an isolation groove 10 which reaches the p-AlGaAs multilayer-film reflection layer 3 or the p-AlGaAs layer 2. The side of the AlGaAs substrate 1 is polished and chemically etched so as to be convenient to form an element; a wafer layer is set to about 100mum. After that, a p-electrode 11 and an n-electrode 12 are formed to form the element.
公开日期1991-05-02
申请日期1989-09-20
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/76109]  
专题半导体激光器专利数据库
作者单位株式会社日立製作所
推荐引用方式
GB/T 7714
KONO TOSHIHIRO,TSUJI SHINJI,HANEDA MAKOTO,et al. Semiconductor laser device. JP1991105991A. 1991-05-02.

入库方式: OAI收割

来源:西安光学精密机械研究所

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