中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser element

文献类型:专利

作者IWAI NORIHIRO; IJICHI TETSURO; MATSUMOTO SHIGETO
发表日期1992-04-13
专利号JP1992111375A
著作权人FURUKAWA ELECTRIC CO LTD:THE
国家日本
文献子类发明申请
其他题名Semiconductor laser element
英文摘要PURPOSE:To simplify a manufacturing process by a method wherein an electrode which is ohmic-joined to a contact layer and which is Schottky-joined to a clad layer is laminated on the clad layer and the contact layer. CONSTITUTION:An n-InGaP clad layer 2, an InGaAs/GaAs strain quantum well active layer 3, a p-InGaP clad layer 4 and a p-InGaAs contact layer 5 are laminated sequentially on an n-GaAs substrate 1 by an MOCVD method. An etching operation is executed down to a halfway part of the p-InGaP clad layer 4 by a photolithographic method or the like; a mesa is formed; after that, Ti/Pt/Au is vapor-deposited as a p-electrode 7 and Au-Ge-Ni/Au is vapor-deposited sequentially as an n-electrode 8. When an electric current flows to an element manufactured in this manner, a Schottky junction part 9 is formed between the p-InGaP clad layer 4 and the p-electrode 7, the electric current flows only between the p-electrode and the p-InGaAs contact layer 5 and the electric current is constricted.
公开日期1992-04-13
申请日期1990-08-30
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/76212]  
专题半导体激光器专利数据库
作者单位FURUKAWA ELECTRIC CO LTD:THE
推荐引用方式
GB/T 7714
IWAI NORIHIRO,IJICHI TETSURO,MATSUMOTO SHIGETO. Semiconductor laser element. JP1992111375A. 1992-04-13.

入库方式: OAI收割

来源:西安光学精密机械研究所

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