Semiconductor laser
文献类型:专利
作者 | HOTTA HITOSHI |
发表日期 | 1992-03-04 |
专利号 | JP1992068586A |
著作权人 | 日本電気株式会社 |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Semiconductor laser |
英文摘要 | PURPOSE:To get a lateral mode control AlGaInP semiconductor laser with low astigmatism by forming A InP layers doped with Zn, which absorb little laser beams generated in an active layer and is of high resistance, on both sides of a double heterostructure mesa stripe part so as to bury the mesa stripe part. CONSTITUTION:On an n-type GaAs substrate are formed an n-type (Al0.6Ga0.4)0.5 In0.5P clad layer 2, a Ga0.5In0.5P active layer 3, a p-type (Al0.6Ga0.4)0.5In0.5P clad layer 4, a p-type Ga0.5In0.5P layer 5, a p-type GaAs cap layer 6, and a stripe-shaped SiO2 mask 9. Next, it is etched into a mesa shape, using this SiO2 mask 9, and then the SiO2 mask 9 is removed, and an AlInP layer 8 doped with Zn is formed on the whole face. Furthermore, the top of the mesa part of the AlInP layer 8 doped with Zn is etched, and then a p-type GaAs contact layer 7 is made. Then, an electrode is made and cleft to get a semiconductor laser. |
公开日期 | 1992-03-04 |
申请日期 | 1990-07-10 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/76848] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | 日本電気株式会社 |
推荐引用方式 GB/T 7714 | HOTTA HITOSHI. Semiconductor laser. JP1992068586A. 1992-03-04. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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