中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser

文献类型:专利

作者OSHIMA MASAAKI; TAKEUCHI YOSHINORI; HASE NOBUYASU
发表日期1987-10-29
专利号JP1987248282A
著作权人MATSUSHITA ELECTRIC IND CO LTD
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To easily obtain a single-vertical-mode semiconductor layer, by providing a dielectric multilayer film consisting of layers having a thickness equal to a wavelength of 1/2n multiplied by an odd number wherein (n) designates a refractive index. CONSTITUTION:An etching-stop layer 2, an N-type clad layer 3, an active layer 4, a P-type clad layer 5, a cap layer 6 and an electrode 7 are formed on an N-type InP substrate The structure is etched such that the ends of the active layer 4 are inclined by 45 degrees, and a reflecting film 9 consisting of an SiO2 layer, an Si layer and an Au layer is provided on the inclined end faces. An electrode 10, the substrate 1 and the stop layer 2 are removed to form circular windows 11 in the regions where laser light from the active layer 4 are guided by the reflecting film 9, and Si3N4 and SiO2 layers are deposited alternately in each of the windows to form a dielectric multilayer film 12. One of the component layers of the multilayer film 12 is provided with a thickness corresponding to 1/2n of a wavelength (n designates a refractive index) multiplied by an odd number. According to this construction, the laser is allowed to have a sharp reflectivity only at an oscillation wavelength and serves just as a DBR laser. In this manner, a single-vertical-mode semiconductor layer can be manufactured more easily than prior arts using diffraction gratings.
公开日期1987-10-29
申请日期1986-04-22
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/77147]  
专题半导体激光器专利数据库
作者单位MATSUSHITA ELECTRIC IND CO LTD
推荐引用方式
GB/T 7714
OSHIMA MASAAKI,TAKEUCHI YOSHINORI,HASE NOBUYASU. Semiconductor laser. JP1987248282A. 1987-10-29.

入库方式: OAI收割

来源:西安光学精密机械研究所

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