中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser

文献类型:专利

作者OOTANI SHIYUNJI
发表日期1983-03-14
专利号JP1983043590A
著作权人SUMITOMO DENKI KOGYO KK
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To obtain a semiconductor laser in a double hetero structure available for single lateral mode oscillation, by forming a projection extended to one direction in a stripe form on a semiconductor substrate and providing a deficit part on a part of a layer on the end part of both side surfaces of the projection. CONSTITUTION:The upper surface of an N type GaAs substrate 10 is coated with a photo resist, a stripe is provided thereon by an exposure, and the projection is formed by a chemical etching with this film as a mask. A P type Ga1-xAlxAs current blocking layer 11 is formed on the substrate of the projection side by a liquid epitaxial growing method. In this case, the deficit part 19 serving as a current concentrated region due to an epitaxial growing speed is formed on both sides of a groove. Next, an N type Ga1-xAlxAs confining layer 12, an n- or P type GaAs active layer 13, a P type Ga1-xAlxAs confining layer 14 and P type GaAs ohmic contact layer 15 are successively formed on the upper surface of the current blocking layer 11 by a liquid epitaxial growing method, a P side electrode 16 is formed on the uppermost layer in a stripe form, and an N side electrode 17 on the substrate 10 resulting in the completion. The N type Ga1-xAlxAs confining layer 12 is formed thick to the degree that deficit parts are not generated.
公开日期1983-03-14
申请日期1981-09-08
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/77272]  
专题半导体激光器专利数据库
作者单位SUMITOMO DENKI KOGYO KK
推荐引用方式
GB/T 7714
OOTANI SHIYUNJI. Semiconductor laser. JP1983043590A. 1983-03-14.

入库方式: OAI收割

来源:西安光学精密机械研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。