中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser

文献类型:专利

作者NOMURA HIDENORI
发表日期1987-03-10
专利号JP1987054992A
著作权人NEC CORP
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To improve ultrahigh speed modulating characteristic by forming a confining layer of a high resistance semiconductor, and forming the buried layers in opposite conductivity types on different sides to an active layer. CONSTITUTION:After a high resistance enclosing layer 4 made of nondoped In0.53Al0.47As, an active layer 5 made of nondoped In0.74Ga0.26As0.56, a high resistance enclosing layer 6 made of nondoped In0.53Al0.47As, and the epitaxial layers are etched in mesa stripe shape, on a substrate 1 made of Fe-doped semi- insulating InP, a crystal structure having a buried layer 2 made of regrown Sn-doped InP, and a cap layer 3 made of Sn-doped In0.74Ga0.26P0.44 is formed. A diffused layer 7 diffused with Zn at one side of the layer 5 of the layers 2, 3 of the layer 5 is inverted in the conductivity type to P-type, positive and negative electrodes 8, 9 are formed on the layer 3, and 2-layer structure of Cr/Au is formed. Thus, a semiconductor laser having ultrahigh speed modulation characteristic of extremely small parasitic capacity is obtained.
公开日期1987-03-10
申请日期1985-09-03
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/77425]  
专题半导体激光器专利数据库
作者单位NEC CORP
推荐引用方式
GB/T 7714
NOMURA HIDENORI. Semiconductor laser. JP1987054992A. 1987-03-10.

入库方式: OAI收割

来源:西安光学精密机械研究所

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