中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser device

文献类型:专利

作者NUMAI TAKAAKI; MITO IKUO
发表日期1988-12-06
专利号JP1988299390A
著作权人NEC CORP
国家日本
文献子类发明申请
其他题名Semiconductor laser device
英文摘要PURPOSE:To obtain a lambda/4 shift type DFB laser having a good yield by making the pitch of the diffraction grating near the phase shift region smaller than the pitch of the diffraction grating corresponding to the Bragg wavelength. CONSTITUTION:On an N-type In substrate 100, a secondary lambda/4 shift diffraction grating is formed using the electron beam lithography. The period is 4800Angstrom in the region to 100mum from the end face, and in the remaining region including the lambda/4 shift position, the period is 3000Angstrom at both sides of the lambda/4 shift position, which is made larger in the nearer position to the end face and 4800Angstrom at the place which is apart from the end face by 100mum. Then, a non-doped InP guide layer 120, an N-type InP buffer layer 130, a non-doped active layer 140 and a P-type clad layer 150 are sequentially grown. With this, a lambda/4 shift type DFB laser having a good yield is obtained.
公开日期1988-12-06
申请日期1987-05-29
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/77639]  
专题半导体激光器专利数据库
作者单位NEC CORP
推荐引用方式
GB/T 7714
NUMAI TAKAAKI,MITO IKUO. Semiconductor laser device. JP1988299390A. 1988-12-06.

入库方式: OAI收割

来源:西安光学精密机械研究所

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