中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Distributed reflection semiconductor laser

文献类型:专利

作者HASHIMOTO HIROKAZU; SUEMATSU ANSEI
发表日期1988-07-13
专利号JP1988169090A
著作权人株式会社フジクラ
国家日本
文献子类发明申请
其他题名Distributed reflection semiconductor laser
英文摘要PURPOSE:To reduce an optical absorption loss and lessen a leakage current passing through an external waveguide region by forming an external waveguide layer after causing it to be a non-doped semiconductor layer and then forming a diffusion layer for current confinement coming from an upper plane electrode to a protecting layer. CONSTITUTION:An active waveguide layer 3 and a protecting layer 4 which form active regions on a substrate 1 perform an epitaxial growth in sequence and both sides of them are reduced by selective etching and an upper plane of the substrate 1 is exposed. Distributed Bragg reflectors 11 are formed on the upper plane of the substrate 1 by etching and allow an external waveguide 16, a clad layer 17, and a cap layer 7 to perform the epitaxial growth in sequence. A Zn diffusion region 18 is formed by Zn diffusion and then the protecting layer 7 and electrodes 10a and 10b are formed. In this way, optical absorption is lessened by causing the external waveguide layer 16 to be a non- doped layer. Then the formation of the diffusion region 18 for current confinement permits electric currents to be concentrated on the active waveguide layer 3 and prevents a leakage current passing through the external waveguide region.
公开日期1988-07-13
申请日期1987-01-06
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/78208]  
专题半导体激光器专利数据库
作者单位株式会社フジクラ
推荐引用方式
GB/T 7714
HASHIMOTO HIROKAZU,SUEMATSU ANSEI. Distributed reflection semiconductor laser. JP1988169090A. 1988-07-13.

入库方式: OAI收割

来源:西安光学精密机械研究所

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