中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
半導体レ-ザ装置及びその製造方法

文献类型:专利

作者島田 直弘
发表日期1996-03-13
专利号JP2501969B2
著作权人株式会社東芝
国家日本
文献子类授权发明
其他题名半導体レ-ザ装置及びその製造方法
英文摘要PURPOSE:To enable a semiconductor laser of required characteristics to be obtained high in uniformity and reproducibility and enhanced in reliability by a method wherein a ridge is accurately formed, and a current blocking layer near the ridge concerned is enhanced in crystallinity. CONSTITUTION:Two parallel grooves 32a and 32b are provided by etching to an optical waveguide layer 30 formed on a semiconductor substrate 25, and a comparatively low ridge 33 whose lengthwise direction is the same with those of the grooves 32a and 32b is provided. Thereafter, a current blocking layer 34 and a third clad layer 35 are formed. Therefore, the ridge 33 can be accurately controlled in dimensions such as height, width, and the like, the current block layer 34 can be comparatively easily grown in crystal, and crystal defects are prevented from concentrating on the vicinity of the ridge 33, so that a semiconductor laser possessed of characteristics in an allowable range and enhanced in reliability can be obtained.
公开日期1996-05-29
申请日期1991-03-25
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/78679]  
专题半导体激光器专利数据库
作者单位株式会社東芝
推荐引用方式
GB/T 7714
島田 直弘. 半導体レ-ザ装置及びその製造方法. JP2501969B2. 1996-03-13.

入库方式: OAI收割

来源:西安光学精密机械研究所

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