中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser device

文献类型:专利

作者NAKANO MUNEAKI; HIRAYAMA FUKUICHI; YOSHIKAWA AKIO; WADA MASARU
发表日期1988-07-26
专利号JP1988181494A
著作权人MATSUSHITA ELECTRIC IND CO LTD
国家日本
文献子类发明申请
其他题名Semiconductor laser device
英文摘要PURPOSE:To inject efficiently an electric current into a groove part by forming a semiconductor multilayer film consisting of two clad layers, an active layer as well as a cap layer as a top one on a semiconductor substrate having two parallel protruding parts by interposing a groove having a prescribed form between the above protruding parts and by forming the groove in a cap layer that is parallel to the groove on the substrate and is located right above the substrate, thereby forming a zinc diffusion region in the cap and the second clad layers. CONSTITUTION:Two parallel ridges are formed on an N-type GaAs substrate 1 by interposing a groove between two ridges. The first clad layer 3 composed of an N-type GaAlAs layer as the first layer, an active layer 4 composed of non-doped GaAs layer as the second layer, the second clad layer 5 composed of P-type GaAlAs layer as the third layer, a cap layer 6 composed of an N-type GaAs layer as the fourth layer grow in sequence on the ridges continuously. After a V-shaped groove 10 is formed at the cap layer 6 of the fourth layer located right above this groove, zinc is diffused on the whole plane of this layer and a zinc diffused region 7 is formed. After that, a P-side ohmic electrode 9 and an N-side ohmic electrode 10 are formed. A prepared wafer is cloven and a laser element is obtained.
公开日期1988-07-26
申请日期1987-01-23
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/79072]  
专题半导体激光器专利数据库
作者单位MATSUSHITA ELECTRIC IND CO LTD
推荐引用方式
GB/T 7714
NAKANO MUNEAKI,HIRAYAMA FUKUICHI,YOSHIKAWA AKIO,et al. Semiconductor laser device. JP1988181494A. 1988-07-26.

入库方式: OAI收割

来源:西安光学精密机械研究所

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