中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser

文献类型:专利

作者SAKIYAMA HAJIME; TANAKA HARUO; MUSHIGAMI MASAHITO
发表日期1990-08-01
专利号JP1990194683A
著作权人ローム株式会社
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To reduce a forward voltage by a method wherein a lower clad layer, an active layer, a first upper clad layer, a photo absorption layer and an evapo ration preventive layer are laminated, a striped groove to reach the first clad layer is bored and when the groove is covered with a second upper clad layer, the first clad layer is formed into a two layer structure and a dopant identical with that in the first upper clad layer is implanted in the interface of the struc ture. CONSTITUTION:An N-type AlxGa1-xAs (x=0.6) lower clad layer 3, an AlxGa1-xAs (x=0.15) active layer 4, a first upper clad layer 5, an N-type GaAs photo absorp tion layer 6 and an N-type AlxGa1-xAs (x=0.15) evaporation preventive layer 7 are laminated in this order on an N-type GaAs substrate 2. At this time, the surface, which corresponds to a striped groove 9, of the layer 5 is formed into a two layer structure and dopant ions identical with a P-type dopant consti tuting the layer 5 are implanted in an interface part 5a of the structure to keep the carrier concentration in the layer 5 high and a series resistance compo nent small. After that, the surface of this layer 5 is covered with a P-type AlyGa1-yAs second upper clad layer 10 including the groove 9.
公开日期1990-08-01
申请日期1989-01-24
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/80126]  
专题半导体激光器专利数据库
作者单位ローム株式会社
推荐引用方式
GB/T 7714
SAKIYAMA HAJIME,TANAKA HARUO,MUSHIGAMI MASAHITO. Semiconductor laser. JP1990194683A. 1990-08-01.

入库方式: OAI收割

来源:西安光学精密机械研究所

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