Optical integrated circuit
文献类型：专利
| 作者 | KOIZUMI YOSHIHIRO |
| 发表日期 | 1988-08-16 |
| 专利号 | JP1988197393A |
| 著作权人 | NEC CORP |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Optical integrated circuit |
| 英文摘要 | PURPOSE:To simplify manufacturing, and improve photo-coupling efficiency, by coupling, via a window region, a semiconductor detection elements to monitor the oscillation light of a distributed feedback type semiconductor laser, and integrating it on the same semiconductor substrate. CONSTITUTION:A semiconductor substrate 15 constituted of N-InP is provided with a primary diffraction grating whose phase is inverted in the phase-shift region 4 at the central part. On the substrate, the following are grown in order; a lower guide layer 3 of N-InGaAsP, an active layer 5 of InGaAsP, and an upper light guide layer 3. Next, a mesa of about 1mum wide is formed. In order to form a window region II, a trench deeper than the active layer 5 is formed. The following are grown; a current block layer 2-1 of P-InP, a current block layer 2-2 of N-InP, a clad layer 1 of P-InP, and a cap layer 8 of P-InGaAsP. Then an oscillation region I and a light receiving region III is separated by the trench formed by etching. Anodes 6-1 and 9-1, and cathodes 6-2 and 9-2 are formed on and under the regions I and III, and then a working process is finished. |
| 公开日期 | 1988-08-16 |
| 申请日期 | 1987-02-10 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/80561]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | NEC CORP |
| 推荐引用方式 GB/T 7714 | KOIZUMI YOSHIHIRO. Optical integrated circuit. JP1988197393A. 1988-08-16. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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