中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser element

文献类型:专利

作者MATSUI KANEKI; MATSUMOTO AKIHIRO; HOSOBANE HIROYUKI
发表日期1991-03-01
专利号JP1991048478A
著作权人SHARP CORP
国家日本
文献子类发明申请
其他题名Semiconductor laser element
英文摘要PURPOSE:To prevent reliability from being reduced even under operation at high output by making the angle formed by both side surfaces of a groove within an upper layer of a laminated structure to be wider than that formed by both side surfaces of a groove within the lower part of the laminated structure. CONSTITUTION:A current construction layer 12 and an inverse dissolution layer 13 are accumulated on a p-GaAs substrate 11 by a first LPE growth method. Then, a groove 9 reaching the substrate 11 from the upper surface of the inverse dissolution layer 13 is formed. Then, a clad layer 14, an active layer 15, etc., are allowed to grow continuously on the groove 9 by the second LPE growth method. At this time, since A1 mixed crystal ratio of the inverse dissolution layer 13 is 0, the inverse dissolution layer 13 is inversely-dissolved during growth of the clad layer 14 and becomes thin. Especially, since the dissolution speed at a shoulder part 18 of the groove 9 is large, the shape of the shoulder part 18 becomes mild. Thus, an angle theta1 formed by both side surfaces of the groove 9 within the inverse dissolution layer becomes larger than an angle theta2 formed by both side surfaces of the groove 9 in the current constriction layer 12, thus preventing a large stress from being concentrated at the active layer 15 which is formed on the clad layer 14.
公开日期1991-03-01
申请日期1989-07-17
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/80683]  
专题半导体激光器专利数据库
作者单位SHARP CORP
推荐引用方式
GB/T 7714
MATSUI KANEKI,MATSUMOTO AKIHIRO,HOSOBANE HIROYUKI. Semiconductor laser element. JP1991048478A. 1991-03-01.

入库方式: OAI收割

来源:西安光学精密机械研究所

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