中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser device

文献类型:专利

作者TODOROKI SATORU; UCHIDA HISATOSHI
发表日期1983-09-29
专利号JP1983164283A
著作权人HITACHI SEISAKUSHO KK
国家日本
文献子类发明申请
其他题名Semiconductor laser device
英文摘要PURPOSE:To obtain a semiconductor laser device which has long lifetime and high reliability by splitting an ohmic contact layer into two, to which the carrier of the device is injected, and preventing the distribution of the injected carrier from passing through the center of the striped groove of the substrate. CONSTITUTION:A resist mask is formed on the (100) surface of an N type GaAs substrate 1, and striped groove 2 is formed in (110) axial direction. An N type Ga1-xAlxAs 3, an N or P type Ga1-yAlyAs active layer 4, a P type Ga1-xAlxAs 5 and an N type Ga1-xAlxAs cap 6 are sequentially epitaxially grown. Then, two ohmic connecting layers 7 are formed by diffusion of Zn in depth partly reaching the clad layer 5 through the layer 6 opposite to the groove 2 while maintaining the interval so as for the distribution of the injected carrier not to pass the center of the groove. Electrodes 8a, 8b of Au series are attached to the layers 6, 7 and the back surface of the substrate. According to this configuration, since the injected carrier excitation and growing phenomenon is produced by avoiding the center of the groove which can feasibly dislocate or produce internal stress, the laser output can be maintained for a long period, thereby providing high reliability.
公开日期1983-09-29
申请日期1982-03-24
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/80839]  
专题半导体激光器专利数据库
作者单位HITACHI SEISAKUSHO KK
推荐引用方式
GB/T 7714
TODOROKI SATORU,UCHIDA HISATOSHI. Semiconductor laser device. JP1983164283A. 1983-09-29.

入库方式: OAI收割

来源:西安光学精密机械研究所

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