中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser

文献类型:专利

作者OSHIMA MASAAKI; HIRAYAMA NORIYUKI; TSURUTA TORU
发表日期1988-04-26
专利号JP1988095694A
著作权人MATSUSHITA ELECTRIC IND CO LTD
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To prevent deterioration, and to obtain a laser having high performance by forming an active layer by second growth. CONSTITUTION:A diffraction grating 1-2 is shaped onto an n-InP substrate 1-1 by using a two-flux interference method and a chemical etching method, etc., and an n-Q layer 1-3, an n-Q layer 1-4, a p-InP layer 1-5, an n InP layer 1-6, and an n-Q layer 1-7 are crystal-grown onto the diffraction grating in succession. An SiO2 insulating film is shaped, a window of SiO2 is bored to a striped shape in 1mum width through a photolithographic means, and the n-Q layer 1-7, the p-InP layer l-6 and the n-Q layer l-4 are removed partially through etching. The SiO2 insulating film is gotten rid of similarly. An n-Q layer active layer 1-8, a p-lnP layer 1-9 and a p-Q layer 1-10 are grown successively through second growth, and electrodes 1-11 and 1-12 are attached, thus manufacturing a laser device.
公开日期1988-04-26
申请日期1986-10-13
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/80975]  
专题半导体激光器专利数据库
作者单位MATSUSHITA ELECTRIC IND CO LTD
推荐引用方式
GB/T 7714
OSHIMA MASAAKI,HIRAYAMA NORIYUKI,TSURUTA TORU. Semiconductor laser. JP1988095694A. 1988-04-26.

入库方式: OAI收割

来源:西安光学精密机械研究所

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