中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser device

文献类型:专利

作者NAGASAKA HIROKO; MOGI NAOTO
发表日期1984-12-12
专利号JP1984220985A
著作权人TOSHIBA KK
国家日本
文献子类发明申请
其他题名Semiconductor laser device
英文摘要PURPOSE:To obtain the titled device of high reliability having no contamination and no defect in spite of formation of the resonator end surface by etching by a method wherein an active layer or the substantial excitation region is provided inside the end surface at a position alienated from the end surface, in the laser device having the hetero junction structure consisting of the active layer and a clad layer. CONSTITUTION:On an N type GaAs substrate 1, an N type GaAlAs main clad layer 2, an N type GaAlAs auxiliary clad layer 3, a P type GaAs active layer 4, a P type GaAlAs auxiliary clad layer 5, a P type GaAlAs main clad layer 6, a P type GaAs ohmic contact layer 7 are epitaxially grown by lamination. Next, a GaAlAs mask layer 21 is provided on the layer 7 and covered with a stripe resist 22, and then this laminated body is changed into a mesa form reaching the substrtate by etching. Thereafter, the resist 22 is removed, this laminated body is buried in a GaAlAs layer 8 provided on the substrate with the layer 21 as a mask, and the resonator end surface is positioned in the layer 8.
公开日期1984-12-12
申请日期1983-05-31
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/81418]  
专题半导体激光器专利数据库
作者单位TOSHIBA KK
推荐引用方式
GB/T 7714
NAGASAKA HIROKO,MOGI NAOTO. Semiconductor laser device. JP1984220985A. 1984-12-12.

入库方式: OAI收割

来源:西安光学精密机械研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。