Semiconductor optical amplifier
文献类型：专利
| 作者 | HANDA YUICHI |
| 发表日期 | 1991-06-11 |
| 专利号 | JP1991136388A |
| 著作权人 | CANON INC |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Semiconductor optical amplifier |
| 英文摘要 | PURPOSE:To provide low reflectivity at input and output end faces and to efficiently couple an input and an output to an exterior by employing as a semiconductor substrate in which various semiconductor layers are laminated, an oblique substrate having a substrate surface orientation inclined with respect to the crystal axis direction of the semiconductor substrate. CONSTITUTION:A GaAs oblique substrate 1 having a surface orientation 20 inclined at an angle theta from (x-axis) 21 of a plane orientation [100] to (y-axis) direction of a plane orientation [010] is provided. A first clad layer 17 of n-type AlGaAs, an optical waveguide 2 used also as an active layer of GaAs and a second clad layer 15 of a p-type AlGaAs are sequentially laminated on the substrate 1 by a MBE method. Thereafter, the layer 15 is formed in a ridge state by an etching process using a photolithography method, then insulating layers of SiNx are provided at both sides of the ridge, a cap layer 14 of a p type AlGaAs is provided on the layer 15, and electrodes 12, 18 of Au are attached to the upper and lower surfaces. |
| 公开日期 | 1991-06-11 |
| 申请日期 | 1989-10-23 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/82028]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | CANON INC |
| 推荐引用方式 GB/T 7714 | HANDA YUICHI. Semiconductor optical amplifier. JP1991136388A. 1991-06-11. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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