中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser device

文献类型:专利

作者MOGI NAOTO; OKAJIMA MASASUE; MUTOU YUUHEI
发表日期1985-01-25
专利号JP1985014482A
著作权人TOSHIBA KK
国家日本
文献子类发明申请
其他题名Semiconductor laser device
英文摘要PURPOSE:To improve the temperature characteristics and to obtain a sufficiently large current constricting effect by a method wherein an optical waveguide path layer, whose refractive index is larger than that of a clad layer, is provided between an active layer and a current stopping layer and the thickness of the optical waveguide path layer is made thicker sufficiently. CONSTITUTION:An n type Ga0.45Al0.55As layer 12, an undopped n type Ga0.88 Al0.12As layer 13, a p type Ga0.63Al0.37As layer 14 and an n type GaAs layer 15 are formed by growth on an n type GaAs substrate 11 with the face direction (100) in the order described. Then, a resist 21 is formed on the current stopping layer 15 excluding a stripe part and a selective etching is performed on the current stopping layer 15 using the resist 21 as a mask up to the depth to reach the optical waveguide path layer 14. As a result, a stripe-shaped groove part 8 is formed in the current stopping layer 15. Then, a p type Ga0.55Al0.45As layer 16 and a p type GaAs layer 17 are successively grown on the total surface using an MOCVD method again. After this, a wafer obtained by vacuum-evaporating a Cr/Au as an electrode on the (p) side and an AuGe-Au as an electrode on the (n) side is cut to the length of the resonator.
公开日期1985-01-25
申请日期1983-07-04
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/82897]  
专题半导体激光器专利数据库
作者单位TOSHIBA KK
推荐引用方式
GB/T 7714
MOGI NAOTO,OKAJIMA MASASUE,MUTOU YUUHEI. Semiconductor laser device. JP1985014482A. 1985-01-25.

入库方式: OAI收割

来源:西安光学精密机械研究所

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