Semiconductor laser element
文献类型:专利
作者 | KANAI MIYO; YAMAGUCHI KEN; UDA TAKESHI; OTOSHI SO; MURAYAMA YOSHIMASA; KAYANE NAOKI |
发表日期 | 1987-06-26 |
专利号 | JP1987143491A |
著作权人 | HITACHI LTD |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Semiconductor laser element |
英文摘要 | PURPOSE:To prevent the deterioration of a semiconductor laser element from its groove shoulder part, by making the neighboring layer with the shoulder part in the form of a groove having higher resistivity than the neighboring layer with other parts of the groove, in order to restrain current concentration to the groove shoulder part. CONSTITUTION:After a high resistivity layer 9 of N-type GaAl0.45As0.55 is deposited on an N-type GaAs substrate 1, a groove is formed by chemical etching. Then, burying the groove, a clad layer 2 of N-type GaAl0.45As0.55 is deposited, and subsequent lamination of an active layer 3 of P-type GaAl0.14 As0.86, a clad layer 4 of P-type GaAl0.145Al0.55P, and a cap layer 5 of P-type GaAs is performed. An electrode 6 of AuGeNi-Au and an electrode 7 of Cr-Au are formed by vapor deposition. In this structure, the layer 9 neighboring with the near part of a groove shoulder 8 has higher resistivity than the substrate 1 neighboring with other parts of the groove, so that a current is easy to flow into the substrate 1, and current concentration to the groove shoulder part is restrained. Deterioration of the groove part of element is prevented, and a semiconductor laser element of high reliability is obtained, thereby. |
公开日期 | 1987-06-26 |
申请日期 | 1985-12-18 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/82933] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | HITACHI LTD |
推荐引用方式 GB/T 7714 | KANAI MIYO,YAMAGUCHI KEN,UDA TAKESHI,et al. Semiconductor laser element. JP1987143491A. 1987-06-26. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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