中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser

文献类型:专利

作者NOMURA HIDENORI
发表日期1987-02-12
专利号JP1987032679A
著作权人NEC CORP
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To obtain a semiconductor laser having a current narrowing structure characterized by an excellent current blocking characteristic and small electrostatic capacitance, by utilizing the physical phenomenon, in which the resistance of a high resistance semiconductor, which has been grown epitaxially, is decreased by the impurity diffusion from a neighboring layer after the growing. CONSTITUTION:In a regrowing process by a molecular beam epitaxy method, a cap layer 5 is evaporated during the heating of a substrate before growing. A high concentration layer of Be is formed on the surface of a confinement layer 4. When a high resistance layer 6 is grown on the confinement layer 4, a high resistance layer 6 in a region at the upper part of a mesa stripe becomes a Be doped state owing to the thermal diffusion of Be. The resistance of the layer 6a becomes low. A current path is automatically formed on an active layer 3. Even in the high resistance layer 6 other than the region at the upper part of the mesa stripe, solid phase diffusion of Be from an embedded layer 7 is yielded. Since the doped concentration of the embedded layer 7 is not so high, the high resistance state is maintained intact, and the function of a current blocking layer is provided.
公开日期1987-02-12
申请日期1985-08-05
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/83028]  
专题半导体激光器专利数据库
作者单位NEC CORP
推荐引用方式
GB/T 7714
NOMURA HIDENORI. Semiconductor laser. JP1987032679A. 1987-02-12.

入库方式: OAI收割

来源:西安光学精密机械研究所

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