Influence of deposition temperature on the structure, optical and electrical properties of a-C films by DCMS
文献类型：期刊论文
| 作者 | Li, Hao; Guo, Peng; Zhang, Dong; Chen, Rende; Zuo, Xiao; Ke, Peiling; Saito, Hidetoshi; Wang, Aiying |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2020 |
| 卷号 | 503 |
| 关键词 | DIAMOND-LIKE-CARBON AMORPHOUS-CARBON SUBSTRATE-TEMPERATURE THIN-FILMS GROWTH SPECTROSCOPY SP(3) TAUC GAP ARC |
| DOI | 10.1016/j.apsusc.2019.144310 |
| 英文摘要 | Influence of deposition temperature on the structure, optical and electrical properties of a-C films by DCMS |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/17780]  |
| 专题 | 2019专题 |
| 作者单位 | 1.Wang, AY (reprint author), Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Zhejiang Key Lab Marine Mat & Protect Technol, Key Lab Marine Mat & Related Technol, Ningbo 315201, Zhejiang, Peoples R China. 2.Guo, P |
| 推荐引用方式 GB/T 7714 | Li, Hao,Guo, Peng,Zhang, Dong,et al. Influence of deposition temperature on the structure, optical and electrical properties of a-C films by DCMS[J]. APPLIED SURFACE SCIENCE,2020,503. |
| APA | Li, Hao.,Guo, Peng.,Zhang, Dong.,Chen, Rende.,Zuo, Xiao.,...&Wang, Aiying.(2020).Influence of deposition temperature on the structure, optical and electrical properties of a-C films by DCMS.APPLIED SURFACE SCIENCE,503. |
| MLA | Li, Hao,et al."Influence of deposition temperature on the structure, optical and electrical properties of a-C films by DCMS".APPLIED SURFACE SCIENCE 503(2020). |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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