Effect of heat treatment on structure and properties of molybdenum nitride and molybdenum carbonitride films prepared by magnetron sputtering
文献类型：期刊论文
| 作者 | Qian, Jianguo; Li, Shuxin; Pu, Jibin; Cai, Zhaobing; Wang, Haixin; Cai, Qun; Ju, Pengfei |
| 刊名 | SURFACE & COATINGS TECHNOLOGY
 |
| 出版日期 | 2019 |
| 卷号 | 374页码:725-735 |
| 关键词 | CHEMICAL-VAPOR-DEPOSITION CR-C-N MECHANICAL-PROPERTIES THIN-FILMS MO-N TRIBOLOGICAL PERFORMANCE HARD COATINGS MICROSTRUCTURE TEMPERATURE FRICTION |
| DOI | 10.1016/j.surfcoat.2019.06.062 |
| 英文摘要 | Effect of heat treatment on structure and properties of molybdenum nitride and molybdenum carbonitride films prepared by magnetron sputtering |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/17962]  |
| 专题 | 2019专题 |
| 作者单位 | 1.Cai, ZB (reprint author), Chinese Acad Sci, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China. 2.Pu, JB |
| 推荐引用方式 GB/T 7714 | Qian, Jianguo,Li, Shuxin,Pu, Jibin,et al. Effect of heat treatment on structure and properties of molybdenum nitride and molybdenum carbonitride films prepared by magnetron sputtering[J]. SURFACE & COATINGS TECHNOLOGY,2019,374:725-735. |
| APA | Qian, Jianguo.,Li, Shuxin.,Pu, Jibin.,Cai, Zhaobing.,Wang, Haixin.,...&Ju, Pengfei.(2019).Effect of heat treatment on structure and properties of molybdenum nitride and molybdenum carbonitride films prepared by magnetron sputtering.SURFACE & COATINGS TECHNOLOGY,374,725-735. |
| MLA | Qian, Jianguo,et al."Effect of heat treatment on structure and properties of molybdenum nitride and molybdenum carbonitride films prepared by magnetron sputtering".SURFACE & COATINGS TECHNOLOGY 374(2019):725-735. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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