Piezoresistive behavior of amorphous carbon films for high performance MEMS force sensors
文献类型：期刊论文
| 作者 | Ma, Xin; Guo, Peng; Tong, Xiaoshan; Zhao, Yulong; Zhang, Qi; Ke, Peiling; Wang, Aiying |
| 刊名 | APPLIED PHYSICS LETTERS
 |
| 出版日期 | 2019 |
| 卷号 | 114期号:25 |
| 关键词 | DIAMOND-LIKE CARBON GAUGE FACTOR TRANSPORT STRAIN RAMAN |
| DOI | 10.1063/1.5096225 |
| 英文摘要 | Piezoresistive behavior of amorphous carbon films for high performance MEMS force sensors |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/18203]  |
| 专题 | 2019专题 |
| 作者单位 | 1.Wang, AY (reprint author), Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Zhejiang, Peoples R China. 2.Wang, AY (reprint author), Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China. 3.Zhang, Q (reprint author), Xi An Jiao Tong Univ, State Key Lab Mech Mfg Syst, Xian 710049, Shaanxi, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Ma, Xin,Guo, Peng,Tong, Xiaoshan,et al. Piezoresistive behavior of amorphous carbon films for high performance MEMS force sensors[J]. APPLIED PHYSICS LETTERS,2019,114(25). |
| APA | Ma, Xin.,Guo, Peng.,Tong, Xiaoshan.,Zhao, Yulong.,Zhang, Qi.,...&Wang, Aiying.(2019).Piezoresistive behavior of amorphous carbon films for high performance MEMS force sensors.APPLIED PHYSICS LETTERS,114(25). |
| MLA | Ma, Xin,et al."Piezoresistive behavior of amorphous carbon films for high performance MEMS force sensors".APPLIED PHYSICS LETTERS 114.25(2019). |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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