Gas Breakdown and Discharge Formation in High-Power Impulse Magnetron Sputtering
文献类型：期刊论文
| 作者 | Zuo, Xiao; Chen, Rende; Ke, Peiling; Wang, Aiying |
| 刊名 | IEEE TRANSACTIONS ON PLASMA SCIENCE
 |
| 出版日期 | 2019 |
| 卷号 | 47期号:2页码:1215-1222 |
| 关键词 | HIPIMS COATINGS DEPOSITION FILMS MICROSTRUCTURE |
| DOI | 10.1109/TPS.2018.2889696 |
| 英文摘要 | Gas Breakdown and Discharge Formation in High-Power Impulse Magnetron Sputtering |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/18591]  |
| 专题 | 2019专题 |
| 作者单位 | 1.Ke, PL 2.Wang, AY (reprint author), Chinese Acad Sci, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Zuo, Xiao,Chen, Rende,Ke, Peiling,et al. Gas Breakdown and Discharge Formation in High-Power Impulse Magnetron Sputtering[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2019,47(2):1215-1222. |
| APA | Zuo, Xiao,Chen, Rende,Ke, Peiling,&Wang, Aiying.(2019).Gas Breakdown and Discharge Formation in High-Power Impulse Magnetron Sputtering.IEEE TRANSACTIONS ON PLASMA SCIENCE,47(2),1215-1222. |
| MLA | Zuo, Xiao,et al."Gas Breakdown and Discharge Formation in High-Power Impulse Magnetron Sputtering".IEEE TRANSACTIONS ON PLASMA SCIENCE 47.2(2019):1215-1222. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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