中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Fast and large-area fabrication of plasmonic reflection color filters by achromatic Talbot lithography

文献类型:期刊论文

作者Wu, QJ; Xia, HJ; Jia, H; Wang, H; Jiang, C; Wang, LS; Zhao, J; Tai, RZ; Xiao, SS; Zhang, DX
刊名OPTICS LETTERS
出版日期2019
卷号44期号:4页码:1031—1034
关键词HIGH-RESOLUTION ARRAYS LIGHT
ISSN号0146-9592
DOI10.1364/OL.44.001031
文献子类期刊论文
英文摘要To overcome the limits of traditional technologies, which cannot achieve high resolution and high throughput simultaneously, here we propose, to the best of our knowledge, a novel method, i.e., achromatic Talbot lithography, to fabricate large-area nanopatterns fast and precisely. We successfully demonstrate reflection color filters with a maximum size of about 0.72 x 0.72 mm(2) with a time of only 20 s that have colors similar to simulations and small-area devices fabricated by electron beam lithography. These results indicate the possibility of large-scale fabrication of plasmonic color filters with high resolution efficiently by the achromatic Talbot lithography method. (C) 2019 Optical Society of America
语种英语
源URL[http://ir.sinap.ac.cn/handle/331007/31632]  
专题上海应用物理研究所_中科院上海应用物理研究所2011-2017年
作者单位1.Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China;
2.Tech Univ Denmark, Dept Photon Engn, DK-2800 Lyngby, Denmark;
3.Zhejiang Univ, State Key Lab Modem Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China;
4.Zhejiang Univ, Sch Mat Sci & Engn, Hangzhou 310027, Zhejiang, Peoples R China
5.Zhejiang Univ, Int Ctr New Struct Mat, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China;
推荐引用方式
GB/T 7714
Wu, QJ,Xia, HJ,Jia, H,et al. Fast and large-area fabrication of plasmonic reflection color filters by achromatic Talbot lithography[J]. OPTICS LETTERS,2019,44(4):1031—1034.
APA Wu, QJ.,Xia, HJ.,Jia, H.,Wang, H.,Jiang, C.,...&Jiang, JZ.(2019).Fast and large-area fabrication of plasmonic reflection color filters by achromatic Talbot lithography.OPTICS LETTERS,44(4),1031—1034.
MLA Wu, QJ,et al."Fast and large-area fabrication of plasmonic reflection color filters by achromatic Talbot lithography".OPTICS LETTERS 44.4(2019):1031—1034.

入库方式: OAI收割

来源:上海应用物理研究所

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