Fast and large-area fabrication of plasmonic reflection color filters by achromatic Talbot lithography
文献类型：期刊论文
| 作者 | Wu, QJ; Xia, HJ; Jia, H; Wang, H; Jiang, C; Wang, LS; Zhao, J; Tai, RZ; Xiao, SS; Zhang, DX |
| 刊名 | OPTICS LETTERS
 |
| 出版日期 | 2019 |
| 卷号 | 44期号:4页码:1031—1034 |
| 关键词 | HIGH-RESOLUTION ARRAYS LIGHT |
| ISSN号 | 0146-9592 |
| DOI | 10.1364/OL.44.001031 |
| 文献子类 | 期刊论文 |
| 英文摘要 | To overcome the limits of traditional technologies, which cannot achieve high resolution and high throughput simultaneously, here we propose, to the best of our knowledge, a novel method, i.e., achromatic Talbot lithography, to fabricate large-area nanopatterns fast and precisely. We successfully demonstrate reflection color filters with a maximum size of about 0.72 x 0.72 mm(2) with a time of only 20 s that have colors similar to simulations and small-area devices fabricated by electron beam lithography. These results indicate the possibility of large-scale fabrication of plasmonic color filters with high resolution efficiently by the achromatic Talbot lithography method. (C) 2019 Optical Society of America |
| 语种 | 英语 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/31632]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China; 2.Tech Univ Denmark, Dept Photon Engn, DK-2800 Lyngby, Denmark; 3.Zhejiang Univ, State Key Lab Modem Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China; 4.Zhejiang Univ, Sch Mat Sci & Engn, Hangzhou 310027, Zhejiang, Peoples R China 5.Zhejiang Univ, Int Ctr New Struct Mat, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China; |
| 推荐引用方式 GB/T 7714 | Wu, QJ,Xia, HJ,Jia, H,et al. Fast and large-area fabrication of plasmonic reflection color filters by achromatic Talbot lithography[J]. OPTICS LETTERS,2019,44(4):1031—1034. |
| APA | Wu, QJ.,Xia, HJ.,Jia, H.,Wang, H.,Jiang, C.,...&Jiang, JZ.(2019).Fast and large-area fabrication of plasmonic reflection color filters by achromatic Talbot lithography.OPTICS LETTERS,44(4),1031—1034. |
| MLA | Wu, QJ,et al."Fast and large-area fabrication of plasmonic reflection color filters by achromatic Talbot lithography".OPTICS LETTERS 44.4(2019):1031—1034. |
入库方式： OAI收割
来源：上海应用物理研究所
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