Numerical and experimental investigation of glow discharge cleaning on SSRF beamline
文献类型：期刊论文
| 作者 | Li, B; Chen, M; Liu, J; Xue, S |
| 刊名 | VACUUM
 |
| 出版日期 | 2019 |
| 卷号 | 163期号:-页码:135—141 |
| 关键词 | CARBON CONTAMINATION HYDROGEN RELEASE OPTICAL-SURFACES OXYGEN REMOVAL |
| ISSN号 | 0042-207X |
| DOI | 10.1016/j.vacuum.2019.02.011 |
| 文献子类 | 期刊论文 |
| 英文摘要 | Synchrotron radiation induced carbon contaminations on optical elements is widely considered to be a major concern for a beamline. The purpose of this paper is to study on glow discharge cleaning (GDC) of the mirror box, striving to prevent carbon contamination formation fundamentally by obtaining a cleaner vacuum chamber. In order to theoretically understand GDC, a 2D fluid model of Ar/O-2 discharge was established, and the discharge physical parameters were obtained under different conditions (Ar/O-2 mixing ratio, electrode arrangement). GDC system was designed and built on the basis of simulation to verify the GDC results. Moreover, we analyzed the influence of GDC on the surface of the optical components. It is found that the average density of metastable particles increases with the increase of oxygen-to-argon ratio. The arrangement of a single electrode is more reasonable for GDC compared with dual electrodes. From the results of quadrupole mass spectrum analysis, we identify that the amount of oil molecules could be reduced by 84% after being cleaned by glow discharge, indicating that GDC has a remarkable effect on removing oil molecules on the surface of the mirror box. However, we found that GDC has some damage to the optical element surface. |
| 语种 | 英语 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/31733]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
| 作者单位 | 1.Univ Chinese Acad Sci, Beijing 100049, Peoples R China; 2.Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China; 3.Dalian Univ Technol, Dalian 116024, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, B,Chen, M,Liu, J,et al. Numerical and experimental investigation of glow discharge cleaning on SSRF beamline[J]. VACUUM,2019,163(-):135—141. |
| APA | Li, B,Chen, M,Liu, J,&Xue, S.(2019).Numerical and experimental investigation of glow discharge cleaning on SSRF beamline.VACUUM,163(-),135—141. |
| MLA | Li, B,et al."Numerical and experimental investigation of glow discharge cleaning on SSRF beamline".VACUUM 163.-(2019):135—141. |
入库方式： OAI收割
来源：上海应用物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。