One-step ion beam irradiation manufacture of 3D micro/nanopatterned structures in SiC with tunable work functions
文献类型：期刊论文
| 作者 | Zhou, YY; Li, SM; Wang, Y; Huang, Q; Zhang, W; Yao, Y; Hao, JM; Sun, Y; Tang, M; Li, B |
| 刊名 | CARBON
 |
| 出版日期 | 2019 |
| 卷号 | 148期号:-页码:387—393 |
| 关键词 | FIELD-EMISSION LITHOGRAPHY FABRICATION TEMPLATE GRAPHENE DEFECTS TIP |
| ISSN号 | 0008-6223 |
| DOI | 10.1016/j.carbon.2019.04.011 |
| 文献子类 | 期刊论文 |
| 英文摘要 | The fabrication and design of high-quality three-dimensional (3D) micro/nanostructures are of great importance for the development of new technology. Herein, we report a one-step technique to controllably manufacture 3D micro/nanopatterned structures with tunable work functions in silicon carbide (SiC). The multiscale micro/nanopatterned structures were produced directly by ion beam irradiation-induced swelling with the assistance of masks. The minimum feature size was similar to 52 nm and the swelling height could be controlled flexibly from similar to 1 to similar to 250 nm. The change of work function of the 3D SiC micro/nanostructures could be tuned in the range between 0 and similar to 126.6 meV. Distinct rectifying junction behavior was demonstrated between the irradiated and unirradiated zones. The Young's modulus and hardness values of the irradiated zones stabilized at similar to 298.1 GPa and similar to 24.9 GPa, respectively. (C) 2019 Elsevier Ltd. All rights reserved. |
| 语种 | 英语 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/31741]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Tech Phys, State Key Lab Infrared Phys, Shanghai 200083, Peoples R China; 2.Chinese Acad Sci, Shanghai Inst Appl Phys, Ctr Thorium Molten Salt Reactor Syst, Shanghai 201800, Peoples R China; 3.Chinese Acad Sci, Shanghai Adv Res Inst, Zhangjiang Lab, Shanghai 201210, Peoples R China; 4.Chinese Acad Sci, Shanghai Inst Appl Phys, Key Lab Interfacial Phys & Technol, Shanghai 201800, Peoples R China; 5.Chinese Acad Sci, Shanghai Inst Appl Phys, Phys Biol Lab, Shanghai 201800, Peoples R China; 6.Univ Chinese Acad Sci, Beijing 100049, Peoples R China; 7.Los Alamos Natl Lab, Los Alamos, NM 87545 USA |
| 推荐引用方式 GB/T 7714 | Zhou, YY,Li, SM,Wang, Y,et al. One-step ion beam irradiation manufacture of 3D micro/nanopatterned structures in SiC with tunable work functions[J]. CARBON,2019,148(-):387—393. |
| APA | Zhou, YY.,Li, SM.,Wang, Y.,Huang, Q.,Zhang, W.,...&Yan, L.(2019).One-step ion beam irradiation manufacture of 3D micro/nanopatterned structures in SiC with tunable work functions.CARBON,148(-),387—393. |
| MLA | Zhou, YY,et al."One-step ion beam irradiation manufacture of 3D micro/nanopatterned structures in SiC with tunable work functions".CARBON 148.-(2019):387—393. |
入库方式： OAI收割
来源：上海应用物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。