Structure evolution and stress transition in diamond-like carbon films by glancing angle deposition
文献类型：期刊论文
| 作者 | Lei, Y; Jiang, JL; Wang, YB; Bi, TT; Zhang, LJ |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2019 |
| 卷号 | 479期号:-页码:12—19 |
| 关键词 | MOLECULAR-DYNAMICS SIMULATION AMORPHOUS-CARBON COMPRESSIVE STRESS INTERNAL-STRESS TRIBOLOGICAL BEHAVIOR SUBPLANTATION MODEL RESIDUAL-STRESS GROWTH SURFACE FABRICATION |
| ISSN号 | 0169-4332 |
| DOI | 10.1016/j.apsusc.2019.02.063 |
| 文献子类 | 期刊论文 |
| 英文摘要 | In this article the diamond-like carbon films have been prepared by the strategy of the glancing angle deposition using unbalanced magnetron sputtering technique. It is found that the structure and the residual stress of the films are strongly dependent on the deposition angle. Of particular interest is that the stress of the films significantly transforms from compressive to tensile state as a function of the deposition angle, which is attributed to the result of the competition and mediation between compressive stress due to surface capillary forces of the island surface and tensile stress due to the coalescence of the islands during Volmer-Weber growth of the films. Based on this mechanism, the nearly stress-free film with desirable performance can be prepared at the proper deposition angle. The correlation between the residual stress and the atomic-bond structure also reveals that the stress transition is not only related to the sp(2)-bonded carbon content, but also closely to the changes of the heptatomic and pentatonic rings in the carbon network. This work demonstrated herein will provide a promising route to prepare the stress-free diamond-like carbon films with desirable performance. |
| 语种 | 英语 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/31832]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
| 作者单位 | 1.Lanzhou Univ Technol, State Key Lab Adv Proc & Recycling Nonferrous Met, Lanzhou 730050, Gansu, Peoples R China; 2.Lanzhou Univ Technol, Dept Phys, Lanzhou 730050, Gansu, Peoples R China; 3.Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai Synchrotron Radiat Facil, Shanghai 201800, Peoples R China |
| 推荐引用方式 GB/T 7714 | Lei, Y,Jiang, JL,Wang, YB,et al. Structure evolution and stress transition in diamond-like carbon films by glancing angle deposition[J]. APPLIED SURFACE SCIENCE,2019,479(-):12—19. |
| APA | Lei, Y,Jiang, JL,Wang, YB,Bi, TT,&Zhang, LJ.(2019).Structure evolution and stress transition in diamond-like carbon films by glancing angle deposition.APPLIED SURFACE SCIENCE,479(-),12—19. |
| MLA | Lei, Y,et al."Structure evolution and stress transition in diamond-like carbon films by glancing angle deposition".APPLIED SURFACE SCIENCE 479.-(2019):12—19. |
入库方式： OAI收割
来源：上海应用物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。