X-ray multilayer mid-frequency characterizations using speckle scanning techniques
文献类型：会议论文
| 作者 | Jiang, H; Yan, S; Liang, DX; Tian, NX; Wang, H; Li, AG |
| 出版日期 | 2017 |
| 会议日期 | AUG 06-07, 2017 |
| 会议地点 | San Diego, CA |
| 关键词 | INTERFACIAL ROUGHNESS MIRRORS SCATTERING TOPOGRAPHY METROLOGY OPTICS FIELD |
| 期号 | — |
| DOI | 10.1117/12.2272194 |
| 英文摘要 | Determination of multilayer structure was developed so much, but most of studies focused on the relationship between structural imperfections and reflectivity. These imperfections, whether interfacial roughness and interdiffusion or surface feature, measured by grazing X-ray scattering, atomic force microscopy or electric microscopy, reflect relatively high-frequency characteristics. The mid-frequency figure errors were regarded as the main factor to produce large satellite peaks near the focusing spot in the multilayer K-B mirror and were found to produce stripes in the far-field imaging. We report novel method to study mid-frequency interface and layer growth characterizations of multilayer structure using at-wavelength speckle scanning technique. This work is beneficial for matching multilayer manufacture technology to the optimization of beam performances. |
| 会议录 | ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS VII
 |
| 文献子类 | 会议论文 |
| 语种 | 英语 |
| ISSN号 | 0277-786X |
| ISBN号 | 978-1-5106-1228-0; 978-1-5106-1227-3 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/31938]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
| 作者单位 | Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai Synchrotron Radiat Facil, Zhangheng Rd 239, Shanghai 201204, Peoples R China |
| 推荐引用方式 GB/T 7714 | Jiang, H,Yan, S,Liang, DX,et al. X-ray multilayer mid-frequency characterizations using speckle scanning techniques[C]. 见:. San Diego, CA. AUG 06-07, 2017. |
入库方式： OAI收割
来源：上海应用物理研究所
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