Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering
文献类型：期刊论文
| 作者 | Liu, Meng; Yang, Yong; Wei, Yuquan; Li, Yajie; Zhang, Heng; Liu, Xuejian; Huang, Zhengren |
| 刊名 | CERAMICS INTERNATIONAL
 |
| 出版日期 | 2019-11-01 |
| 卷号 | 45期号:16页码:19771 |
| ISSN号 | 0272-8842 |
| 关键词 | SiC Dense High-purity Pressureless solid-state-sintering |
| DOI | 10.1016/j.ceramint.2019.06.231 |
| 文献子类 | Article |
| 英文摘要 | High-purity SiC materials have been used in semiconductor processes due to their excellent properties. However, they are difficult to densify without sintering aids. In this work, dense and high-purity SiC ceramics have been obtained by pressureless solid-state-sintering with ultra-low contents of sintering additives. The amount of residual B, C and O in the high-purity SiC ceramics was less than 0.15 wt%, respectively, and the total content of other impurity elements (such as aluminum, magnesium, calcium, iron, etc.) was less than 0.015 wt%. Finally, the purity of the as-prepared SiC ceramics was more than 99.5 wt%. |
| WOS研究方向 | Materials Science |
| 语种 | 英语 |
| 出版者 | ELSEVIER SCI LTD |
| 源URL | [http://ir.sic.ac.cn/handle/331005/26739]  |
| 专题 | 中国科学院上海硅酸盐研究所 |
| 推荐引用方式 GB/T 7714 | Liu, Meng,Yang, Yong,Wei, Yuquan,et al. Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering[J]. CERAMICS INTERNATIONAL,2019,45(16):19771. |
| APA | Liu, Meng.,Yang, Yong.,Wei, Yuquan.,Li, Yajie.,Zhang, Heng.,...&Huang, Zhengren.(2019).Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering.CERAMICS INTERNATIONAL,45(16),19771. |
| MLA | Liu, Meng,et al."Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering".CERAMICS INTERNATIONAL 45.16(2019):19771. |
入库方式： OAI收割
来源：上海硅酸盐研究所
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