Spatial Resolutions of On-Axis and Off-Axis Transmission Kikuchi Diffraction Methods
文献类型：期刊论文
| 作者 | Shen, Yitian; Xu, Jingchao; Zhang, Yongsheng; Wang, Yongzhe; Zhang, Jimei; Yu, Baojun; Zeng, Yi; Miao, Hong |
| 刊名 | APPLIED SCIENCES-BASEL
 |
| 出版日期 | 2019-11-30 |
| 卷号 | 9期号:21 |
| 关键词 | transmission Kikuchi diffraction (TKD) transmission electron back-scatter diffraction (t-EBSD) on-axis detector spatial resolution |
| DOI | 10.3390/app9214478 |
| 文献子类 | Article |
| 英文摘要 | Spatial resolution is one of the key factors in orientation microscopy, as it determines the accuracy of grain size investigation and phase identification. We determined the spatial resolutions of on-axis and off-axis transmission Kikuchi diffraction (TKD) methods by calculating correlation coefficients using only the effective parts of on-axis and off-axis transmission Kikuchi patterns. During the calculation, we used average filtering to evaluate the spatial resolution more accurately. The spatial resolutions of both on-axis and off-axis TKD methods were determined in the same scanning electron microscope at different accelerating voltages and specimen thicknesses. The spatial resolution of the on-axis TKD was higher than that of the off-axis TKD at the same parameters. Furthermore, with an increase in accelerating voltage or a decrease in specimen thickness, the spatial resolutions of the two configurations could be significantly improved, from tens of nanometers to below 10 nm. At a voltage of 30 kV and sample thickness of 74 nm, both on-axis and off-axis TKD methods exhibited the highest resolutions of 6.2 and 9.7 nm, respectively. |
| WOS关键词 | ELECTRON BACKSCATTERED DIFFRACTION ; SPECIMEN-THICKNESS ; NANOCRYSTALLINE MATERIALS ; EBSD ; PATTERNS |
| WOS研究方向 | Chemistry ; Materials Science ; Physics |
| 语种 | 英语 |
| 出版者 | MDPI |
| 源URL | [http://ir.sic.ac.cn/handle/331005/27508]  |
| 专题 | 中国科学院上海硅酸盐研究所 |
| 推荐引用方式 GB/T 7714 | Shen, Yitian,Xu, Jingchao,Zhang, Yongsheng,et al. Spatial Resolutions of On-Axis and Off-Axis Transmission Kikuchi Diffraction Methods[J]. APPLIED SCIENCES-BASEL,2019,9(21). |
| APA | Shen, Yitian.,Xu, Jingchao.,Zhang, Yongsheng.,Wang, Yongzhe.,Zhang, Jimei.,...&Miao, Hong.(2019).Spatial Resolutions of On-Axis and Off-Axis Transmission Kikuchi Diffraction Methods.APPLIED SCIENCES-BASEL,9(21). |
| MLA | Shen, Yitian,et al."Spatial Resolutions of On-Axis and Off-Axis Transmission Kikuchi Diffraction Methods".APPLIED SCIENCES-BASEL 9.21(2019). |
入库方式： OAI收割
来源：上海硅酸盐研究所
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