A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts
文献类型：期刊论文
| 作者 | Song, Miao1,3; Yang, Yafeng1,2; Guo, Junjie1,3; Xiang, Maoqiao1; Zhu, Qingshan1,3; Ge, Yu1 |
| 刊名 | CERAMICS INTERNATIONAL
 |
| 出版日期 | 2019-10-15 |
| 卷号 | 45期号:15页码:18265-18272 |
| ISSN号 | 0272-8842 |
| 关键词 | Chemical vapor deposition Metastable precursor Nanograin size TiN coating |
| DOI | 10.1016/j.ceramint.2019.06.037 |
| 英文摘要 | High quality TiN coated 316L stainless steel can hardly be fabricated by the traditional chemical vapor deposition (CVD) methods because of the formation of HCl (g) corrosive byproduct and phase transformation at high deposition temperature. To address the problem, herein, for the first time a novel TiCl2 precursor is proposed to fabricate TiN coating on 316L substrate in N-2 atmosphere at low temperature. The idea is based on that metastable TiCl2 can release fresh Ti atoms by its disproportionation reaction, and then the fresh Ti atoms react easily with N-2 to form TiN coating at low temperature without HCl byproduct. The reaction path, interface reaction, and performance of the TiN coating were investigated. The optimized nanograin TiN (45 nm) coating was successfully fabricated on 316L at 750 degrees C and it exhibited excellent corrosion resistance. |
| WOS关键词 | CHEMICAL-VAPOR-DEPOSITION ; MECHANICAL-PROPERTIES ; THIN-FILMS ; CVD ; MICROSTRUCTURE ; BEHAVIOR ; TICL4 |
| 资助项目 | National Natural Science Foundation of China[11805227] ; National Natural Science Foundation of China[21736010] ; DNL Cooperation Fund, CAS[DNL180304] |
| WOS研究方向 | Materials Science |
| 语种 | 英语 |
| 出版者 | ELSEVIER SCI LTD |
| WOS记录号 | WOS:000483454200012 |
| 资助机构 | National Natural Science Foundation of China ; DNL Cooperation Fund, CAS |
| 源URL | [http://ir.ipe.ac.cn/handle/122111/30652]  |
| 专题 | 中国科学院过程工程研究所 |
| 通讯作者 | Xiang, Maoqiao; Zhu, Qingshan |
| 作者单位 | 1.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China 2.Dalian Natl Lab Clean Energy, Dalian 116023, Peoples R China 3.Univ Chinese Acad Sci, Sch Chem Engn, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Song, Miao,Yang, Yafeng,Guo, Junjie,et al. A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts[J]. CERAMICS INTERNATIONAL,2019,45(15):18265-18272. |
| APA | Song, Miao,Yang, Yafeng,Guo, Junjie,Xiang, Maoqiao,Zhu, Qingshan,&Ge, Yu.(2019).A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts.CERAMICS INTERNATIONAL,45(15),18265-18272. |
| MLA | Song, Miao,et al."A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts".CERAMICS INTERNATIONAL 45.15(2019):18265-18272. |
入库方式： OAI收割
来源：过程工程研究所
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