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Fabrication of Vertical Organic Nanowire Arrays via Modified Nanoimprint Lithography

文献类型：期刊论文

作者Zhang, Man2,3; Xia, Liangping1,3; Dang, Suihu3; Cao, Axiu2; Shi, Lifang2; Deng, Qiling2; Du, Chunlei3
刊名NANOSCIENCE AND NANOTECHNOLOGY LETTERS
出版日期2019-07-01
卷号11期号:7页码:1004-1007
关键词Vertical Organic Nanowire Arrays Modified Nanoimprint Lithography Porous Anodic Alumina High-Aspect-Ratio Chemical Corrosion Solution
ISSN号1941-4900
DOI10.1166/nnl.2019.2972
通讯作者Zhang, Man()
英文摘要In this study, polymer high-aspect-ratio vertical organic nanowire arrays with sub-100 nm resolution were fabricated using a new method based on modified nanoimprint lithography, including UV-imprinting process and chemical corrosion solution. Porous anodic alumina membranes are the imprint templates having pore diameters of about 300 nm and 70 nm-90 nm. We performed the fabrication of the polymer nanowire array structures. Replication performance for the UV-curable imprint resister was verified by nanoimprinting technique to replicate the porous anodic alumina templates. Releasing the templates using chemical corrosion of alkali solution, we achieved the polymer nanowire arrays with nanowire diameters of 300 nm and 70 nm-90 nm and depths of 30 mu m and 3 mu m, and the aspect ratio of about 100:1 and 40:1. We herein also discuss the physical performance of the polymer resist and optical performance for high-aspect-ratio structures. The polymer nanowire arrays have potential applications such as electronic and optical devices and new method in complicated and extreme structures.
资助项目National Natural Science Foundation of China (NSFC)[51703227] ; National Natural Science Foundation of China (NSFC)[C0025053] ; National Natural Science Foundation of China (NSFC)[61605211] ; National Natural Science Foundation of China (NSFC)[61504147] ; National Natural Science Foundation of China (NSFC)[61775213] ; Sichuan Science and Technology Program[2017RZ0031] ; Sichuan Science and Technology Program[2019YJ0014] ; Instrument Development of Chinese Academy of Sciences ; National R&D Program of China[2017YFC0804900] ; Youth Innovation Promotion Association of Chinese Academy of Sciences
WOS研究方向Science & Technology - Other Topics ; Materials Science ; Physics
语种英语
WOS记录号WOS:000483217400013
出版者AMER SCIENTIFIC PUBLISHERS
源URL[http://119.78.100.138/handle/2HOD01W0/9575]  
专题中国科学院重庆绿色智能技术研究院
通讯作者Zhang, Man
作者单位1.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
3.Yangtze Normal Univ, Sch Elect Informat Engn, Chongqing 408100, Peoples R China
推荐引用方式
GB/T 7714		 Zhang, Man,Xia, Liangping,Dang, Suihu,et al. Fabrication of Vertical Organic Nanowire Arrays via Modified Nanoimprint Lithography[J]. NANOSCIENCE AND NANOTECHNOLOGY LETTERS,2019,11(7):1004-1007.
APA Zhang, Man.,Xia, Liangping.,Dang, Suihu.,Cao, Axiu.,Shi, Lifang.,...&Du, Chunlei.(2019).Fabrication of Vertical Organic Nanowire Arrays via Modified Nanoimprint Lithography.NANOSCIENCE AND NANOTECHNOLOGY LETTERS,11(7),1004-1007.
MLA Zhang, Man,et al."Fabrication of Vertical Organic Nanowire Arrays via Modified Nanoimprint Lithography".NANOSCIENCE AND NANOTECHNOLOGY LETTERS 11.7(2019):1004-1007.

入库方式： OAI收割

来源：重庆绿色智能技术研究院

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