中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Simulations of dislocation density in silicon carbide crystals grown by the PVT-method

文献类型:期刊论文

作者Chen QS(陈启生)1,2,3; Zhu P(朱鹏)1,3; He M(何蒙)1,3
刊名JOURNAL OF CRYSTAL GROWTH
出版日期2020-02-01
卷号531页码:6
关键词Computer simulation Defects Heat transfer Stresses Growth from vapor Semiconducting silicon compounds
ISSN号0022-0248
DOI10.1016/j.jcrysgro.2019.125380
通讯作者Chen, Qi-Sheng(qschen@imech.ac.cn)
英文摘要The Alexander-Haasen (AH) model has been applied to analyze the plastic deformation and dislocation generation during the crystal growth process of 4H-SiC (silicon carbide). Plastic parameters are obtained by fitting the predicted curves to the experimental data on the plastic deformation of alpha-SiC crystals under uniaxial compression. The relationship between the activity energy (Q) and stress exponent (n) is considered when using the AH model. This relationship explicitly represents two deformation mechanisms around the critical temperature. The ratio of the activity energy and stress exponent, Q/n, equals 0.3 eV when the temperature is below the transition temperature, and 1.3 eV when the temperature is above the transition temperature. Then, the model is used to predict the dislocation density and thermal stresses in the crystals. The largest dislocation density is found to occur near the graphite/SiC interface, and the dislocation density gradually decreases with the thickness of the ingot.
分类号Q3
WOS关键词SIC SINGLE-CRYSTALS ; PLASTIC BEHAVIOR ; ACTIVATION PARAMETERS ; NUMERICAL-SIMULATION ; SUBLIMATION GROWTH ; DYNAMICS ; GLIDE
资助项目National Natural Science Foundation of China[11772344] ; National Natural Science Foundation of China[11532015]
WOS研究方向Crystallography ; Materials Science ; Physics
语种英语
WOS记录号WOS:000504205900044
资助机构National Natural Science Foundation of China
其他责任者Chen, Qi-Sheng
源URL[http://dspace.imech.ac.cn/handle/311007/81252]  
专题力学研究所_国家微重力实验室
作者单位1.Univ Chinese Acad Sci, Sch Engn Sci, Beijing 100190, Peoples R China
2.Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China;
3.Chinese Acad Sci, Inst Mech, Key Lab Micrograv, Beijing 100190, Peoples R China;
推荐引用方式
GB/T 7714
Chen QS,Zhu P,He M. Simulations of dislocation density in silicon carbide crystals grown by the PVT-method[J]. JOURNAL OF CRYSTAL GROWTH,2020,531:6.
APA 陈启生,朱鹏,&何蒙.(2020).Simulations of dislocation density in silicon carbide crystals grown by the PVT-method.JOURNAL OF CRYSTAL GROWTH,531,6.
MLA 陈启生,et al."Simulations of dislocation density in silicon carbide crystals grown by the PVT-method".JOURNAL OF CRYSTAL GROWTH 531(2020):6.

入库方式: OAI收割

来源:力学研究所

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