中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser device

文献类型:专利

作者KUDO KAZUHIRO; OKI YOSHIMASA; TOYODA YUKIO
发表日期1986-03-29
专利号JP1986061486A
著作权人MATSUSHITA ELECTRIC IND CO LTD
国家日本
文献子类发明申请
其他题名Semiconductor laser device
英文摘要PURPOSE:To add a stable high sole longitudinal mode property by forming the active layer of a semiconductor laser or part of a multiplex quantum well structure of a waveguide at random to form an inner reflecting surface. CONSTITUTION:An Se-doped N type GaAs buffer layer 2, an Se-doped N type Al0.4Ga0.6As clad layer 3, an active layer 4 having a multiplex quantum well structure of 30 layers of non-doped AlAs layers and non-doped GaAs layers, an Se-doped N type Al0.4Ga0.6As clad layer 5 and an Se-doped N type GaAs cap layer 6 are sequentially epitaxially grown by an organic metal decomposing method on a semi-insulating GaAs layer substrate Then, with an SiO2 film as a mask Zn is diffused to a semi-insulating GaAs substrate, and a wafer in which a superlattice structure is formed at random in a Zn-diffused region 7 is manufacture. P type electrodes 8 and N type electrodes 9 are formed, a cap layer between the both electrodes is removed by etching, and a semicon ductor laser element is manufactured by cleaving.
公开日期1986-03-29
申请日期1984-09-03
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/83227]  
专题半导体激光器专利数据库
作者单位MATSUSHITA ELECTRIC IND CO LTD
推荐引用方式
GB/T 7714
KUDO KAZUHIRO,OKI YOSHIMASA,TOYODA YUKIO. Semiconductor laser device. JP1986061486A. 1986-03-29.

入库方式: OAI收割

来源:西安光学精密机械研究所

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