中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser device and method for fabricating the same

文献类型:专利

作者HONKAWA, YUKIO; ONO, TAKAHIRO; HATTORI, SATOSHI; SATO, YOSHIHIRO
发表日期2005-01-06
专利号US20050002431A1
著作权人THE FURUKAWA ELECTRIC CO., LTD.
国家美国
文献子类发明申请
其他题名Semiconductor laser device and method for fabricating the same
英文摘要A method for fabricating a buried semiconductor laser device including the steps of: forming a mesa structure including a bottom cladding layer, an active layer and a top cladding layer overlying an n-type semiconductor substrate; and forming a current confinement structure by growing a p-type current blocking layer and an n-type current blocking layer on each side surface of the mesa structure and on a skirt portion extending from the each side surface, the p-type current blocking layer being fabricated by using a raw material gas containing a group III element gas and a group V element gas at a molar ratio between 60 and 350 inclusive. In this method, the semiconductor laser device including the current confinement structure with the specified leakage current path width can be fabricated with the excellent reproducibility.
公开日期2005-01-06
申请日期2004-06-16
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/83282]  
专题半导体激光器专利数据库
作者单位THE FURUKAWA ELECTRIC CO., LTD.
推荐引用方式
GB/T 7714
HONKAWA, YUKIO,ONO, TAKAHIRO,HATTORI, SATOSHI,et al. Semiconductor laser device and method for fabricating the same. US20050002431A1. 2005-01-06.

入库方式: OAI收割

来源:西安光学精密机械研究所

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