中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser device

文献类型:专利

作者OKADA MASATO
发表日期1990-03-22
专利号JP1990081492A
著作权人MITSUBISHI ELECTRIC CORP
国家日本
文献子类发明申请
其他题名Semiconductor laser device
英文摘要PURPOSE:To prevent the surface of an upper clad layer from being oxidized, to enhance a crystal property of a recrystallized interface and to obtain a semiconductor laser device of high reliability by a method wherein the surface of the upper clad layer is coated with a protective layer. CONSTITUTION:In a first epitaxial growth process, a lower clad layer 2, an active layer 3, an upper clad layer 4, a protective layer 10 and a current- blocking layer 5 are formed on a substrate Then, a prescribed part of the current-blocking layer 5 is processed to be a stripe shape; a groove 6 for current passage use is formed. During this process, the surface of the upper clad layer 4 is covered with the protective layer 10. Then, a cap layer 7 and a contact layer 8 are formed in a second epitaxial growth process; after that, an n-side electrode 9b is formed on the side of the substrate 1 and a p-side electrode 9a is formed on the side of the contact layer 8; thereby, a semiconductor laser device is obtained.
公开日期1990-03-22
申请日期1988-09-17
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/83468]  
专题半导体激光器专利数据库
作者单位MITSUBISHI ELECTRIC CORP
推荐引用方式
GB/T 7714
OKADA MASATO. Semiconductor laser device. JP1990081492A. 1990-03-22.

入库方式: OAI收割

来源:西安光学精密机械研究所

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