Semiconductor optical waveguide
文献类型：专利
| 作者 | IWAI, NORIHIRO; NISHIKATA, KAZUAKI; KASUKAWA, AKIHIKO |
| 发表日期 | 2001-08-28 |
| 专利号 | US6281523 |
| 著作权人 | FURUKAWA ELECTRIC CO. LTD., THE |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Semiconductor optical waveguide |
| 英文摘要 | A method for manufacturing a semiconductor optical waveguide comprises the steps of forming a core layer having an Al content which monotonically increases from the central part thereof to the film surface, and selectively oxidizing the core layer to obtain a peripheral, oxidized region and a central, non-oxidized region acting as a waveguide. The waveguide is tapered to have a circular mode field at the distal end thereof for efficiently coupling with an optical fiber. |
| 公开日期 | 2001-08-28 |
| 申请日期 | 1997-10-31 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/83566]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | FURUKAWA ELECTRIC CO. LTD., THE |
| 推荐引用方式 GB/T 7714 | IWAI, NORIHIRO,NISHIKATA, KAZUAKI,KASUKAWA, AKIHIKO. Semiconductor optical waveguide. US6281523. 2001-08-28. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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