中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser element

文献类型:专利

作者MORI YOSHIHIRO; SHIBATA ATSUSHI
发表日期1988-02-13
专利号JP1988033887A
著作权人MATSUSHITA ELECTRIC IND CO LTD
国家日本
文献子类发明申请
其他题名Semiconductor laser element
英文摘要PURPOSE:To reduce leakage currents, and to lead out an upper surface electrode proper for a planar type OEIC by minimizing the area of a homogeneous P-N junction in a clad layer and limiting the homogeneous P-N junction only near a section just above an active layer. CONSTITUTION:An InGaAsP active layer 101, a P clad layer 102, an N buried layer 103, an N clad layer 104, a P diffusion layer 105 formed by diffusing zinc in order to ensure the width of a P electrode 9 sufficiently widely, and a cap layer 106 for lowering contact resistance are shaped onto an N-type InP substrate 107. The width W of the P diffusion layer 105 is acquired by adding the width L of a contact section with the P electrode 109 and the alignment precision of a mask aligner, and brought normally to approximately W=10 micron to L=5 micron. The width W of the layer 105 is quintuple as large as 2 micron of the width of the active layer, and is made smaller than conventional examples by approximately two figures. Accordingly, the quantity of currents flowing through a homogeneous P-N junction in the clad layer 102 is inhibited, and operating currents can be reduced while both P and N electrodes can be shaped on the epitaxial growth side surface of, an element, keeping the flatness of the epitaxial growth side surface.
公开日期1988-02-13
申请日期1986-07-28
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/83731]  
专题半导体激光器专利数据库
作者单位MATSUSHITA ELECTRIC IND CO LTD
推荐引用方式
GB/T 7714
MORI YOSHIHIRO,SHIBATA ATSUSHI. Semiconductor laser element. JP1988033887A. 1988-02-13.

入库方式: OAI收割

来源:西安光学精密机械研究所

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