中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
半導体レーザ装置

文献类型:专利

作者吉沢 みすず; 山下 茂雄; 大石 昭夫; 梶村 俊
发表日期1997-05-30
专利号JP2656482B2
著作权人株式会社日立製作所
国家日本
文献子类授权发明
其他题名半導体レーザ装置
英文摘要PURPOSE:To improve the reliability of a semiconductor laser device and to improve the yield of an element by reducing the aluminum molar ratio of a semiconductor which forms the clad layer in the bottom of a stripe smaller than that of a semiconductor which forms the other clad layer. CONSTITUTION:An N-type clad layer 2, an active layer 3, a P-type clad layer 4, and an N-type GaAs current narrowing layer 5 are sequentially formed on a substrate crystal Thereafter, the layer 5 is removed to form a groove stripe having 1-15mum of width exposed on the layer 4. Then, a P-type buried clad layer 6, and a P-type cap layer 7 are formed. The aluminum molar ratio of the P-type GaAlAs clad layer exposed at the time of forming the groove stripe is reduced smaller than that of the N-type GaAs clad layer to eliminate the oxide on the exposed surface in the atmosphere at the time of forming the stripe. Accordingly, the oxide is not formed to obtain high yield and high reliability.
公开日期1997-09-24
申请日期1987-03-11
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/84075]  
专题半导体激光器专利数据库
作者单位株式会社日立製作所
推荐引用方式
GB/T 7714
吉沢 みすず,山下 茂雄,大石 昭夫,等. 半導体レーザ装置. JP2656482B2. 1997-05-30.

入库方式: OAI收割

来源:西安光学精密机械研究所

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