中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser

文献类型:专利

作者IDOTA TAKESHI; HIRAYAMA NORIYUKI
发表日期1988-11-28
专利号JP1988289985A
著作权人MATSUSHITA ELECTRIC IND CO LTD
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To obtain semiconductor laser excellent in its transversal mode of oscillation without performing a photoetching process of high resolution, by forming an active layer inside a stripe groove of InP in the direction [110] in which a plane P {T11} and a plane approximately vertical to a plane (001) are exposed so that both ends of the active layer are located on the plane P {T11}. CONSTITUTION:An active layer 8 is formed inside A stripe groove which is formed in a substrate having several epitaxial layers on an InP plane (001) and in the direction [110] in which a plane P {T11} and a plane approximately vertical to the plane (001) are exposed so that both ends of the layer 8 are located on the plane P {T11}. For example, after an InP buffer layer 2, an InP current block layer 3, and an InGaAsP mask layer 4 are formed serially on the plane (001) of the InP substrate 1 by epitaxial growth processing, a stripe groove 5 of an arrowhead shape in its cross-sectional area is formed about 2 mum in width. Next, an n-type InP clad layer 7, an InGaAsP active layer 8, a p-type InP clad layer 9 and a p-type InGaAsP contact layer 10 are formed serially by the epitaxial growth processing so that both ends of the InGaAsP active layer 8 are located on the plane P {T11} of the groove 5.
公开日期1988-11-28
申请日期1987-05-22
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/84263]  
专题半导体激光器专利数据库
作者单位MATSUSHITA ELECTRIC IND CO LTD
推荐引用方式
GB/T 7714
IDOTA TAKESHI,HIRAYAMA NORIYUKI. Semiconductor laser. JP1988289985A. 1988-11-28.

入库方式: OAI收割

来源:西安光学精密机械研究所

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