半導体レーザ
文献类型:专利
作者 | 斉藤 勝利; 小林 正道; 反町 進; 柏田 泰利; 茅根 直樹 |
发表日期 | 1997-04-25 |
专利号 | JP2633833B2 |
著作权人 | 株式会社日立製作所 |
国家 | 日本 |
文献子类 | 授权发明 |
其他题名 | 半導体レーザ |
英文摘要 | PURPOSE:To provide bonding to a heat-radiating body on any side of a P electrode and an N electrode and mounting in a package by a method wherein both of the P and N electrodes are provided with each barrier layer, which prevents the constituent metal of a substrate semiconductor from diffusing outward and also, prevents solder from diffusing into the interior. CONSTITUTION:In the formation of the substrate crystal of a GaAs/GaAlAs semiconductor laser, a selective P-type diffused layer 23, which penetrates an N-type GaAs cap layer 21 and reaches a P-type GaAlAs clad layer 22, is first formed in advance. Then, a P-type electrode layer is provided on the surface of a semiconductor wherein there exists the diffused layer 23, Mo is vacuum- evaporated to form a P-type ohmic electrode layer 27, Pt is continuosly evaporated to form a diffusion barrier layer 28 and lastly, Au is continuously evaporated to provide a metallic layer of bonding. Similarly, on the side of an N-type GaAs substrate 26, a tree-layer structure ohmic electrode layer 30 consisting of AuGe-Pt-Au is vacuum-evaporated, Pt to consititute a diffusion barrier layer 28 is continuosly evaporated and lastly, Au is continuosly evaporated to form a metallic layer for bonding. |
公开日期 | 1997-07-23 |
申请日期 | 1986-07-14 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/84319] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | 株式会社日立製作所 |
推荐引用方式 GB/T 7714 | 斉藤 勝利,小林 正道,反町 進,等. 半導体レーザ. JP2633833B2. 1997-04-25. |
入库方式: OAI收割
来源:西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。