中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
半導体レーザ

文献类型:专利

作者斉藤 勝利; 小林 正道; 反町 進; 柏田 泰利; 茅根 直樹
发表日期1997-04-25
专利号JP2633833B2
著作权人株式会社日立製作所
国家日本
文献子类授权发明
其他题名半導体レーザ
英文摘要PURPOSE:To provide bonding to a heat-radiating body on any side of a P electrode and an N electrode and mounting in a package by a method wherein both of the P and N electrodes are provided with each barrier layer, which prevents the constituent metal of a substrate semiconductor from diffusing outward and also, prevents solder from diffusing into the interior. CONSTITUTION:In the formation of the substrate crystal of a GaAs/GaAlAs semiconductor laser, a selective P-type diffused layer 23, which penetrates an N-type GaAs cap layer 21 and reaches a P-type GaAlAs clad layer 22, is first formed in advance. Then, a P-type electrode layer is provided on the surface of a semiconductor wherein there exists the diffused layer 23, Mo is vacuum- evaporated to form a P-type ohmic electrode layer 27, Pt is continuosly evaporated to form a diffusion barrier layer 28 and lastly, Au is continuously evaporated to provide a metallic layer of bonding. Similarly, on the side of an N-type GaAs substrate 26, a tree-layer structure ohmic electrode layer 30 consisting of AuGe-Pt-Au is vacuum-evaporated, Pt to consititute a diffusion barrier layer 28 is continuosly evaporated and lastly, Au is continuosly evaporated to form a metallic layer for bonding.
公开日期1997-07-23
申请日期1986-07-14
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/84319]  
专题半导体激光器专利数据库
作者单位株式会社日立製作所
推荐引用方式
GB/T 7714
斉藤 勝利,小林 正道,反町 進,等. 半導体レーザ. JP2633833B2. 1997-04-25.

入库方式: OAI收割

来源:西安光学精密机械研究所

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