Optical integrated circuit
文献类型：专利
| 作者 | UEOKA YASUSHIGE; NISHI NORIO; SHUDO KEIZO; SEKINE SATOSHI |
| 发表日期 | 1989-08-15 |
| 专利号 | JP1989202882A |
| 著作权人 | NIPPON TELEGR & TELEPH CORP |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Optical integrated circuit |
| 英文摘要 | PURPOSE:To acquire a compact hybrid optical integrated circuit having good processability by etching a semiconductor substrate whereon a semiconductor laser is manufactured and by forming a monolithic dielectric multilayer to manufacture the dielectric optical circuit. CONSTITUTION:An edge side 4 of a semiconductor laser 2 manufactured on a semiconductor substrate 1 of refractive index n1 exposed by etching, an upper surface 5 of the semiconductor laser 2, and a primary dielectric film 7 of three layers 8-10 (n1>n2>n3) which consist of refractive index n2, n3, and n2 and cover a semiconductor substrate surface 8 exposed by etching are provided. In this way, integration of an optical circuit which controls waveguide light and an optical circuit which electrically controls light emitting and photo detector, etc., at a low temperature not exceeding 200 deg.C in monolithic and with good efficiency of optical coupling. In this way, highly efficient optical coupling branching circuit parts, etc., can be obtained by providing an optical circuit which is electrically controlled on the semiconductor substrate 1, and an optical circuit which controls the waveguide light to a primary dielectric film 7 which is stable against temperature change and has less photoconducting loss in good processability and compactness. |
| 公开日期 | 1989-08-15 |
| 申请日期 | 1988-02-08 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/84438]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | NIPPON TELEGR & TELEPH CORP |
| 推荐引用方式 GB/T 7714 | UEOKA YASUSHIGE,NISHI NORIO,SHUDO KEIZO,et al. Optical integrated circuit. JP1989202882A. 1989-08-15. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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