Light-emitting element
文献类型:专利
作者 | MIZUYOSHI AKIRA |
发表日期 | 1987-07-18 |
专利号 | JP1987162371A |
著作权人 | MITSUBISHI CABLE IND LTD |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Light-emitting element |
英文摘要 | PURPOSE:To obtain a light-emitting element which can effectively provide a large gain in the vertical direction, by providing an inclined hole in a semiconductor substrate on which an active region is extended horizontally, and providing a reflection mirror on a side wall of the hole in opposition to the active region. CONSTITUTION:An active region 3 having a P-N junction or a single or double hetero structure is extended horizontally on a substrate 2 of a compound semiconductor selected from the groups III-V, II-VI and IV-VI, the active region 3. The substrate is provided with a through hole 4 having a side wall inclined by an angle theta of 40-50 deg. and having a width L1 of about 10-100mum. A reflection mirror 6 formed of the same metal material as that of an electrode 5 is provided on one side wall 4 When a voltage is applied between electrodes 1 and 5 on the opposite surfaces of the element, high output light emitted horizontally from the horizontal active region 3 is reflected by the mirror 6 and emitted out vertically to the semiconductor substrate 2. The inclined hole 4 may be formed with high precision by IRE or IRBE technique, and the reflection mirror 6 can be formed in desired shapes by performing RIE or wet etching after performing IRBE. |
公开日期 | 1987-07-18 |
申请日期 | 1986-01-10 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/84489] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | MITSUBISHI CABLE IND LTD |
推荐引用方式 GB/T 7714 | MIZUYOSHI AKIRA. Light-emitting element. JP1987162371A. 1987-07-18. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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