Semiconductor laser and its manufacture
文献类型：专利
| 作者 | OTSUKA SHIGEKI; TSUBOTA TAKASHI |
| 发表日期 | 1988-10-03 |
| 专利号 | JP1988237489A |
| 著作权人 | OKI ELECTRIC IND CO LTD |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Semiconductor laser and its manufacture |
| 英文摘要 | PURPOSE:To prevent the generation of short circuit and leakage due to the end-surface-coat of a metal reflecting film, by forming a part extending from the end surface of one side of a light emitting surface of a laser element to a surface neighbouring with the above-mentioned surface. CONSTITUTION:A light emitting surface 12 of a semiconductor laser element 11 is arranged upwards on a jig 10, and the surface is sandwiched by spacers 15 made of silicon and the like which are longer than the cavity length of the element 1 An insulating film serving as a reflecting film, e.g., Al2O3 film 14 is vapor-deposited. At this time, not only the end surface but also the surface neighboring with the end surface are coated with the Al2O3 film. Only the end surface of the semiconductor laser element 11 sandwiched by the spacers 15 made of, e.g., silicon and the like which are longer than the cavity length of the element 11 is exposed. In this state, an Au film 16 is vapor-deposited to 500Angstrom thickness. As the insulating film 14 neighbors with the end surface of the element 11 and reaches also the electrode sides, the short circuit and leakage of the electrode caused by the deposited film 16 can be prevented. |
| 公开日期 | 1988-10-03 |
| 申请日期 | 1987-03-26 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/84509]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | OKI ELECTRIC IND CO LTD |
| 推荐引用方式 GB/T 7714 | OTSUKA SHIGEKI,TSUBOTA TAKASHI. Semiconductor laser and its manufacture. JP1988237489A. 1988-10-03. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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