中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
半導体素子

文献类型:专利

作者近藤 正彦; 皆川 重量
发表日期1997-05-02
专利号JP2641484B2
著作权人株式会社日立製作所
国家日本
文献子类授权发明
其他题名半導体素子
英文摘要PURPOSE:To suppress the generation of a natural lattice and to implement the short wavelength in an AlGaInP laser, by providing a crystal substrate having the surface orientation of (n11) or the surface orientation which is deviated from said orientation within a specified angle, end providing mixed crystal semiconductor layers having a disordered alignment structure which is epitaxially formed on the substrate. CONSTITUTION:A crystal substrate 1 has the surface orientation of (n11) [where, 1<=n<5] or the surface orientation which is deviated within five degrees from said surface orientation. Mixed semiconductor layers 2-4 having a disordered alignment structure are epitaxially formed on the crystal substrate For example, the Si doped GaAs substrate 1 has the surface orientation which is inclined by three degrees in the direction of (100) from (111)B. An Se doped Al0.25Ca0.25 In0.5P clad layer, a non-doped Ga0.5In0.5P active layer 3 and Zn doped Al0.25Ga0.25 In0.5P clad layer 4 are epitaxially grown sequentially on the substrate An SiO2 current blocking film 5, a P electrode 6 and an N electrode 7 are formed on a double-hetero wafer obtained in this way. Thereafter, the device is cleaved into chips each having the size of 200X300mum, and the semiconductor lasers are obtained.
公开日期1997-08-13
申请日期1988-03-22
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/84591]  
专题半导体激光器专利数据库
作者单位株式会社日立製作所
推荐引用方式
GB/T 7714
近藤 正彦,皆川 重量. 半導体素子. JP2641484B2. 1997-05-02.

入库方式: OAI收割

来源:西安光学精密机械研究所

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